Publicação
Design and simulation of a direct and indirect drive electrostatically actuated resonant micro-mirrors for scanner applications
| datacite.subject.fos | Engenharia e Tecnologia::Engenharia dos Materiais | pt_PT |
| dc.contributor.advisor | Grech, Ivan | |
| dc.contributor.advisor | Pereira, Luís | |
| dc.contributor.author | Rodrigues, Marco António Cavaco | |
| dc.date.accessioned | 2019-10-31T15:57:13Z | |
| dc.date.available | 2019-10-31T15:57:13Z | |
| dc.date.issued | 2018-10 | |
| dc.date.submitted | 2018 | |
| dc.description.abstract | Laser scanners have been an integral part of MEMS research for more than three decades. The demand for electrostatically actuated scanning micro-mirrors have been growing in the last decade, mainly for pico-projection and medical applications. These type of actuation wins over others, because it provides long-term stability, size advantages and fabrication schemes which are easier to render CMOS compatibility. The growing field in softwares capable of design and simulate MEMS devices, have been a crucial help for engineers, which are limited to a few of them and still cost huge amount of time. MEMS+® is a software platform that provides simulation results up to 100 times faster than conventional finite element analysis tools and allows to integrate designs in MathWorks®. In this work two types of electrostatically actuated scanning micro-mirrors were designed and simulated using both MEMS+® and MathWorks®, one is a direct drive micro-mirror and the other an indirect drive micro-mirror. In the first the torque is imparted directly from the actuation mechanism to the frame containing the mirror, and in the second the resonance mode amplifies a small motion in a larger mass to a considerably larger motion in the smaller mirror. Regarding the direct-drive micro-mirror, the presented work mainly shows the reliability of MEMS+® compared to other softwares. The indirect drive one, is a state-of-art solution for high frequency electrostatically actuated micro-mirrors, and all the simulations taken on it were aimed to verify it´s behaviour, and then proceed with the microfabrication step. The target microfabrication technology is SOIMUMPs. | pt_PT |
| dc.identifier.uri | http://hdl.handle.net/10362/85990 | |
| dc.language.iso | eng | pt_PT |
| dc.subject | Scanning micro-mirror | pt_PT |
| dc.subject | electrostatically actuated | pt_PT |
| dc.subject | MEMS+® | pt_PT |
| dc.subject | direct drive | pt_PT |
| dc.subject | indirect drive | pt_PT |
| dc.subject | SOIMUMPs | pt_PT |
| dc.title | Design and simulation of a direct and indirect drive electrostatically actuated resonant micro-mirrors for scanner applications | pt_PT |
| dc.type | master thesis | |
| dspace.entity.type | Publication | |
| rcaap.rights | openAccess | pt_PT |
| rcaap.type | masterThesis | pt_PT |
| thesis.degree.name | Master of Science in Micro and Nanotechnologies Engineering | pt_PT |