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Compact gate valve for UHV
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Orientador(es)
Resumo(s)
A compact gate valve for UHV is described. The valve was designed to allow isolation of the ion source volume of an ion gun used in a surface analysis system. Therefore, filaments can be replaced without ultra-high vacuum loss in the analysis chamber. Other applications for this valve are suggested. The valve has been built inside a DN40CF flange. Operation of the valve is done by a linear actuator. Differential pumping is possible with the use of a Tee in the actuator connection. The construction details are described and the testing results are presented.
Descrição
The authors acknowledge the Portuguese Foundation for Science and Technology for the financial support to this work. It was partially supported through the project PRAXIS 3/31/MMA/1764/95.
Palavras-chave
Instrumentation Condensed Matter Physics Surfaces, Coatings and Films