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Detaljna karakterizacija tankih filmova na bazi ti-o dobijenih katodno lučnim isparavanjem
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Resumo(s)
Physicochemical properties of thin films on the base of titanium oxides, obtained by a cathodic arc evaporation on the surface of glass substrate are analysed in details. The analysis of these films was made by using XRD, FTIR, SEM, XPS analysis and ellipsometry. On the basis of these analyses, particularly analysis obtained by XPS, the oxidative state Ti and corresponding phases are determined through various film layers from the surface to the substrate. The depth of the various levels and their extinction coefficients and refractory indexes are estimated by ellipsometry.
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© 2021 Authors. Published by Engineering Society for Corrosion.
Palavras-chave
Ellipsometry FTIR SEM Titanium oxide thin films XPS XRD General Materials Science