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Cylindrical hot cathode ionisation gauge
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| 9.34 MB | Adobe PDF |
Orientador(es)
Resumo(s)
A novel design of an ionisation vacuum gauge is presented, aiming to achieve predictable sensitivity and high accuracy in high and the ultra-high vacuum range. The proposed design features a belt-like electron beam emitted from a linear filament, following a circular trajectory between two cylindrical electrodes, resembling a cylindrical analyser. The proposed design offers several key upsides: a precisely defined electron beam trajectory with reduced susceptibility to path variations, effective electron collection in a Faraday cup able to contain secondary emissions and backscattered electrons, and the inclusion of a suppressor grid in front of the ion collector to eliminate ion-induced secondary electron emission. These features are expected to secure high stability of the gauge and the low pressure limit. An in-depth description of the design is presented, along with the discussions on simulations of the key components that provide the improved performance.
Descrição
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© 2023 The Authors
Palavras-chave
Accuracy Ionisation vacuum gauge SIMION Simulation Instrumentation Condensed Matter Physics Surfaces, Coatings and Films