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Development of a design for an ionisation vacuum gauge suitable as a reference standard

dc.contributor.authorJenninger, Berthold
dc.contributor.authorAnderson, Johan
dc.contributor.authorBernien, Matthias
dc.contributor.authorBundaleski, Nenad
dc.contributor.authorDimitrova, Hristiyana
dc.contributor.authorGranovskij, Mihail
dc.contributor.authorIllgen, Claus
dc.contributor.authorSetina, Janez
dc.contributor.authorJousten, Karl
dc.contributor.authorKucharski, Pawel
dc.contributor.authorReinhardt, Christian
dc.contributor.authorScuderi, Francesco
dc.contributor.authorSilva, Ricardo
dc.contributor.authorStöltzel, Anke
dc.contributor.authorTeodoro, Orlando M. N. D.
dc.contributor.authorTrzpil-Jurgielewicz, Beata
dc.contributor.authorWüest, Martin
dc.contributor.institutionDF – Departamento de Física
dc.contributor.institutionCeFITec – Centro de Física e Investigação Tecnológica
dc.contributor.pblElsevier
dc.date.accessioned2021-10-04T23:15:58Z
dc.date.available2021-10-04T23:15:58Z
dc.date.issued2021-01
dc.descriptionUID/FIS/00068/2019
dc.description.abstractThe EURAMET EMPIR project “16NRM05 - Ion gauge” aims to develop an ionisation vacuum gauge suitable as a reference vacuum standard. In such a gauge the electron trajectories and their kinetic energy inside the ionisation volume should be well defined and stable. In the search for a suitable design, a series of simulations on different ionisation gauge concepts that have the potential to meet stringent stability requirements have been carried out. Different software packages were used for this purpose. This paper focuses on the design aspects and the performance of the different ionisation gauge concepts that have been investigated by simulation. Parameters such as ionisation gauge sensitivity, ion collection efficiency and electron transmission efficiency, have been determined as a function of emission current, pressure and electron source alignment.en
dc.description.versionpublishersversion
dc.description.versionpublished
dc.format.extent21498783
dc.identifier.doi10.1016/j.vacuum.2020.109884
dc.identifier.issn0042-207X
dc.identifier.otherPURE: 28814326
dc.identifier.otherPURE UUID: 7b5fe48f-6768-409c-af1a-31bb3f6882b9
dc.identifier.otherScopus: 85096372400
dc.identifier.otherWOS: 000600753500003
dc.identifier.otherORCID: /0000-0002-3424-2847/work/100976805
dc.identifier.urihttp://hdl.handle.net/10362/125601
dc.identifier.urlhttps://www.scopus.com/pages/publications/85096372400
dc.language.isoeng
dc.peerreviewedyes
dc.subjectHot cathode
dc.subjectIonisation gauge
dc.subjectReference standard
dc.subjectSensitivity
dc.subjectSimulation
dc.subjectInstrumentation
dc.subjectCondensed Matter Physics
dc.subjectSurfaces, Coatings and Films
dc.titleDevelopment of a design for an ionisation vacuum gauge suitable as a reference standarden
dc.typejournal article
degois.publication.titleVacuum
degois.publication.volume183
dspace.entity.typePublication
rcaap.rightsopenAccess

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