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Evaluation and metrological performance of a novel ionisation vacuum gauge suitable as reference standard
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Orientador(es)
Resumo(s)
Recently, a new type of ionization vacuum gauge was introduced, which was proposed as a reference and transfer standard in the range of 10-6 Pa to 10-2 Pa because of its excellent stability and linearity. In contrast to present models of ionisation vacuum gauges, all electrons have a well-defined path length through the ionisation space. This even allows one to predict the sensitivity for a gas species provided that the ionisation cross section of the gas molecules for electrons between 50 eV and 200 eV is known. Following the development of this gauge we investigated its metrological performance in terms of linearity, resolution, repeatability, reproducibility, transport and long-term stability, disturbances by magnetic fields, influence of the surrounding earth potential and so on. The gauge demonstrated excellent metrological properties and is indeed suitable as an accurate reference and transfer standard, but can also provide important economic benefits to manufacturers and users.
Descrição
Funding Information: This work has received funding from the EMPIR programme (projects 16NRM05 and 20SIP01) co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation programme and the Portuguese National Funding Agency for Science, Research and Technology in the framework of the project UIDB/FIS/ 00068/2020. Publisher Copyright: © 2023 The Author(s)
Palavras-chave
Hot cathode Ion induced secondary electron yield Ionisation vacuum gauge Secondary electrons Sensitivity Instrumentation Electrical and Electronic Engineering